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发明名称	WAFER CLEANER
摘要
申请公布号	JPH07283187(A)	申请公布日期	1995.10.27
申请号	JP19940095790	申请日期	1994.04.08
申请人	SONY CORP	发明人	AISAKA TSUTOMU
分类号	B08B11/04;B08B3/04;H01L21/304;(IPC1-7):H01L21/304	主分类号	B08B11/04
代理机构		代理人
主权项
地址

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