A cover assembly for reactive gas processing apparatus.

摘要

The disclosure relates to an assembly of replaceable parts for use in a substrate processing apparatus. Covers (84) for the substrate processing surface (34) are attached in a plurality of pieces as opposed to a solid piece, for removeability without removing the wafer support pedestals. A ring (86) for surrounding the pedestal includes snap-on screw-like fasteners (90) enabling the ring to snap in placed onto the pedestal. A focus ring (88) for surrounding the pedestal ring attaches to the pedestal ring via a snug fit into a built-in grooved series of notches (103) in the pedestal ring.