发明名称 COMPOSITION FOR TREATING SURFACE OF SUBSTRATE, METHOD AND DEVICE
摘要 Treatment compositions and methods of treating the surface of a substrate by using the treatment composition, and a semiconductor or MEMS substrate having the treatment composition thereon.
申请公布号 WO2016161289(A1) 申请公布日期 2016.10.06
申请号 WO2016US25558 申请日期 2016.04.01
申请人 AIR PRODUCTS AND CHEMICALS, INC. 发明人 INAOKA, Seiji;CASTEEL, William, Jack, Jr.;VRTIS, Raymond, Nicholas;THEODOROU, Kathleen, Esther;CHEN, Tianniu;BROWN, Mark, Richard
分类号 C11D7/36;C11D7/28;C11D7/50 主分类号 C11D7/36
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