| 发明名称 |
Low dielectric constant coatings |
| 摘要 |
Disclosed are Si-O containing ceramics having a dielectric constant less than or equal to about 3.2 which is stable over time. These properties render the ceramics valuable on electronic substrates.
|
| 申请公布号 |
US5523163(A) |
申请公布日期 |
1996.06.04 |
| 申请号 |
US19950402428 |
申请日期 |
1995.03.10 |
| 申请人 |
DOW CORNING CORPORATION |
发明人 |
BALLANCE, DAVID S.;CAMILLETTI, ROBERT C.;DUNN, DIANA K.;UTTECHT RONALD ROBERT |
| 分类号 |
C01B33/113;C01B33/00;C04B35/04;H01L21/3105;H01L21/316;(IPC1-7):B32B18/00 |
主分类号 |
C01B33/113 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
