发明名称 |
Semiconductor device having an inter-layer via (ILV), and method of making same |
摘要 |
A three dimensional semiconductor device includes a first memory device, a second memory device and a via. The via connects the first memory device to the second memory device. |
申请公布号 |
US9484350(B2) |
申请公布日期 |
2016.11.01 |
申请号 |
US201314039481 |
申请日期 |
2013.09.27 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
Huang Tsung-Hsien;Cheng Hong-Chen;Lee Cheng-Hung;Liao Hung-Jen |
分类号 |
H01L29/76;H01L27/112;G11C7/18;H01L23/522;H01L27/06 |
主分类号 |
H01L29/76 |
代理机构 |
Hauptman Ham, LLP |
代理人 |
Hauptman Ham, LLP |
主权项 |
1. A three dimensional semiconductor device comprising:
a first memory device; a bit line connected to the first memory device; a first drain via connected to the bit line and the first memory device; a second memory device; and a first via, wherein the first via connects a first source via of the first memory device to a second source via of the second memory device. |
地址 |
TW |