发明名称 Laser system for laser ablation process and laser ablation process for preparing thin film of oxide superconductor material thereby
摘要 A laser system comprising a laser oscillator emitting laser beam, and an attenuator disposed on a light path of the laser beam and damping intensity of the laser beam in which intensity of the laser beam can be controlled so as to maintain a required value after the attenuator.
申请公布号 US5544182(A) 申请公布日期 1996.08.06
申请号 US19940229716 申请日期 1994.04.19
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 NAGAISHI, TATSUOKI;ITOZAKI, HIDEO
分类号 H01S3/10;B23K26/42;C23C14/28;H01L21/268;(IPC1-7):H01S3/13 主分类号 H01S3/10
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