| 摘要 |
A heater(3) is formed at the lower portion of an outer cabinet(1), and a quartz chamber(2) is placed on it and fixed by holders(35 and 35'). The quartz chamber(2) includes: a cooling coil(11) at the upper portion thereof; a condensed water induction coil(21) that is located under the cooling coil(11); and a water drip tray(26) with a cover(27), that is installed at the lower portion thereof. A robot arm(5) loaded with carriers(25 and 25') containing wafers(24 and 24') stops its ascent/descent operation by a driving unit(31). Iso propyl alcohol(33) passes by vapor drying operation to an induction coil(17) in the quartz chamber(2).
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