| 申请人 |
SHIN-ETSU CHEMICAL CO., LTD., TOKIO/TOKYO, JP |
发明人 |
TAKAGO, TOSHIO, ANNAKA-SHI, GUNMA-KEN, JP;KISHITA, HIROFUMI, ANNAKA-SHI, GUNMA-KEN, JP;KINAMI, HITOSHI, ANNAKA-SHI, GUNMA-KEN, JP;FUKUDA, KENICHI, ANNAKA-SHI, GUNMA-KEN, JP;SATO, SHINICHI, ANNAKA-SHI, GUNMA-KEN, JP;YAMAGUCHI, KOICHI, TAKASAKI-SHI, GUNMA-KEN, JP;SUGANUMA, SHUJI, TAKASAKI-SHI, GUNMA-KEN, JP |
