Process for evaluating the output signals of two pressure sensors and a pressure measuring arrangement with two pressure measuring sensors and a pressure measuring head

摘要

Particularly for the combination of cold-cathode ionization sensors and Pirani sensors, for obtaining a one-to-one measuring range which is significantly expanded compared to the measuring ranges of the respective sensor types, a weighting technique is provided in a transition range DELTA P of the respective sensor measuring ranges by which the characteristic sensor curves can constantly be guided into one another in a one-to-one manner.