One-piece arc evapn. unit esp. cathode

摘要

An arc evapn. unit consists of a one-piece assembly including an electrode (4) mounted on a water-cooled electrode support (1), the novelty being that the electrode (4) is surrounded by a metal or alloy screen (5) which is insulated from the electrode (4) and the vacuum chamber (7) contg. the evapn. unit. Pref. the screen (5) consists of a magnetisable metal or alloy, esp. ferritic steel, and the ratio of the electrode diameter to the difference between the outside and inside diameters of the electrode screen is 1:2 to 5:1, pref. 1.5:2 to 3:1.