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发明名称
MASTERS LICE TYPE SEMICONDUCTOR DEVICE MANUFACTURING METHOD
摘要
申请公布号
JPH0917983(A)
申请公布日期
1997.01.17
申请号
JP19950164344
申请日期
1995.06.29
申请人
NEC CORP
发明人
ADACHI KAZUO
分类号
H01L27/118;H01L21/82;(IPC1-7):H01L27/118
主分类号
H01L27/118
代理机构
代理人
主权项
地址
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