CELL ALIGNMENT APPARATUS AND ALIGNING METHOD

摘要

A cell alignment apparatus comprises a first platform (40) for carrying a first substrate, a second platform (50) for carrying a second substrate, and a pre-aligning device. The first platform (40) has a first suction surface and a second suction surface oppositely disposed for sucking up the first substrate. The pre-aligning device is configured to adjust a position of the first platform (40) to pre-align the first substrate and the second substrate. The cell alignment apparatus further comprises: a turnover device for turning over the first substrate by turning over the first platform (40); an aligning device for aligning the second substrate and the turned-over first substrate by adjusting a position of the second platform (50); and a cell alignment device for cell aligning the first substrate and the second substrate by controlling the movement of the first substrate.