发明名称 NON-CORROSIVE PHOTORESIST STRIPPER COMPOSITION
摘要 A non-corrosive positive photoresist stripper composition comprising: (a) a solvent selected from N-methyl-2-pyrrolidone, N-hydroxyethyl-2-pyrrolidone, 1,3-dimethyl-2-imidazolidinone dimethylsulfoxide, and admixtures thereof; (b) a corrosion inhibitor selected from tricine, bicine, (2-benzothiozolythio)succinic acid, and admixtures thereof; (c) optionally, an alkanolamine selected from diethyleneglycolamine, monoethanolamine, diethanolamine, triethanolamine, and admixtures thereof; (d) optionally, water; and (e) optionally, a water-soluble surface active compound.
申请公布号 WO9703381(A1) 申请公布日期 1997.01.30
申请号 WO1996US10845 申请日期 1996.06.24
申请人 OLIN MICROELECTRONIC CHEMICALS, INC. 发明人 HONDA, KENJI;PERRY, DONALD, F.;MAW, TAISHIH
分类号 C11D7/32;G03F7/42;(IPC1-7):G03C5/00;G03C11/12;C11D7/06;C11D1/18 主分类号 C11D7/32
代理机构 代理人
主权项
地址