| 摘要 |
PROBLEM TO BE SOLVED: To provide a breaking method by which a substrate can be broken along a scribe line even if the substrate is thin.SOLUTION: A breaking method includes steps (a), (b), (c). In the step (a), a guide bar 2 is loaded on a substrate W along a scribe line 12a. In the step (b), an impact shock which is directed to the substrate W is given onto the guide bar 2 after the step (a). In the step (c), in the state that one region of the substrate W with the scribe line 12 as a border is projected from a bearing member 30, the one region is pressed from above and is broken after the step (b).SELECTED DRAWING: Figure 1 |
