发明名称 Field-effect transistor and method of producing same
摘要 A field-effect transistor has its gate length made to be minute, and a short channel effect is prevented. The field-effect transistor which attains the above objects has first and second semiconductor regions having different impurity concentrations disposed so as to be adjacent to each other. A source electrode is disposed on the second semiconductor region with a high impurity concentration, a drain electrode on the first semiconductor region with a low impurity concentration, and a gate electrode on the first semiconductor region side of the second semiconductor region. To produce the above field-effect transistor, a production method comprises a step of forming a first semiconductor region on the major surface of a semiconductor substrate, a step of forming a gate electrode to divide the first semiconductor region, and a step of doping impurities in the first semiconductor region on one side of the gate electrode with the gate electrode as the mask, to form a second semiconductor region which is of the same conductive type with the first semiconductor region and has a different impurity concentration from the first semiconductor region.
申请公布号 US5640029(A) 申请公布日期 1997.06.17
申请号 US19950551285 申请日期 1995.10.31
申请人 TOYOTA JIDOSHA KABUSHIKI KAISHA 发明人 OHNISHI, TOYOKAZU
分类号 H01L29/872;H01L21/265;H01L21/28;H01L21/285;H01L21/338;H01L29/08;H01L29/423;H01L29/47;H01L29/812;(IPC1-7):H01L29/80;H01L21/26 主分类号 H01L29/872
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