| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection system capable of efficiently inspecting a biaxial MEMS mirror.SOLUTION: An inspection system for a biaxial MEMS mirror reflecting light in a first axial direction and a second axial direction orthogonal to each other comprises: a first irradiation part irradiating the biaxial MEMS mirror as an inspection target with a laser beam; a first sensor arranged in a third axial direction orthogonal to the first axial direction and the second axial direction, at least receiving the laser beam in the first axial direction reflected by the biaxial MEMS mirror, and outputting a signal; and a second sensor arranged in a position not overlapping on the first sensor when viewed from the biaxial MEMS mirror, receiving the laser beam in the second axial direction reflected by the biaxial MEMS mirror, and outputting a signal.SELECTED DRAWING: Figure 3 |
