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发明名称
DEVICE FOR PLATE ORIENTATION
摘要
申请公布号
RU2099815(C1)
申请公布日期
1997.12.20
申请号
RU19960117572
申请日期
1996.09.02
申请人
VORONEZHSKAYA GOSUDARSTVENNAYA TEKHNOLOGICHESKAYA AKADEMIYA
发明人
ABRAMOV GENNADIJ VLADIMIROVICH;BITYUKOV VITALIJ KSENOFONTOVICH;NAZINA LYUDMILA IVANOVNA;POPOV GENNADIJ VASILEVICH
分类号
H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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