发明名称 |
Micromachined vibratory rate gyroscope |
摘要 |
A microfabricated gyroscope to measure rotation about an axis parallel to the surface of the substrate. A voltage differential may be applied between pairs of electrode fingers to reduce the quadrature error. A microfabricated gyroscope includes a vibratory structure and interdigited electrodes having a high aspect ratio. |
申请公布号 |
AU3474497(A) |
申请公布日期 |
1998.01.05 |
申请号 |
AU19970034744 |
申请日期 |
1997.05.30 |
申请人 |
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA, |
发明人 |
WILLIAM A. CLARK;THOR JUNEAU;ROGER T HOWE |
分类号 |
G01C19/5719 |
主分类号 |
G01C19/5719 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|