发明名称 POLARIZATION MASK AND EXPOSURE METHOD OF SEMICONDUCTOR WAFER USING IT
摘要 A picture cutting mask and an exposure method of a semiconductor system are disclosed. First, a pattern is formed at a chrome layer(1). Thereafter, a polarization is established and a mask(11) is arranged on a semiconductor plate(5) coated by a photo-resist layer(4). And then, an infrared lay(6) is irradiated.
申请公布号 KR0135064(B1) 申请公布日期 1998.04.18
申请号 KR19930026035 申请日期 1993.12.01
申请人 LG SEMICONDUCTOR CO.,LTD 发明人 YUN, HYUN-DO
分类号 G03F1/00;G03F1/50;(IPC1-7):G03F1/00;G03F7/20 主分类号 G03F1/00
代理机构 代理人
主权项
地址