The invention concerns a device for treating substrates (5) in a fluid container containing a treatment fluid, said device comprising at least one holder arrangement (1) for the substrates (5) and/or at least one substrate carrier (4). According to the invention, more reliable and more rapid removal and drying of the treatment fluid is attained if the holder arrangement (1) comprises a fluid-suction device.
申请公布号
DE19644779(A1)
申请公布日期
1998.05.07
申请号
DE1996144779
申请日期
1996.10.28
申请人
STEAG MICROTECH GMBH, 72124 PLIEZHAUSEN, DE
发明人
SCHOENLEBER, DIETMAR, 72124 PLIEZHAUSEN, DE;FINGERHOLZ, AURELIA, 72124 PLIEZHAUSEN, DE
