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发明名称
摘要
申请公布号
JP2754236(B2)
申请公布日期
1998.05.20
申请号
JP19890104448
申请日期
1989.04.26
申请人
HITACHI SEISAKUSHO KK;HITACHI TOBU SEMIKONDAKUTA KK
发明人
NAGAMINE TOORU;SHIMIZU KAZUO;HOSHI AKIRO
分类号
H01L23/50;(IPC1-7):H01L23/50
主分类号
H01L23/50
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