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发明名称
METHOD AND EQUIPMENT FOR INSPECTING PATTERN
摘要
申请公布号
JPH10256326(A)
申请公布日期
1998.09.25
申请号
JP19970052953
申请日期
1997.03.07
申请人
SHARP CORP
发明人
NAKAMURA ATSURO
分类号
G01B11/24;G01N21/88;G01N21/93;G06T1/00;G06T7/00;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01B11/24
代理机构
代理人
主权项
地址
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