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发明名称
PLASMA TREATING DEVICE
摘要
申请公布号
JPH10270429(A)
申请公布日期
1998.10.09
申请号
JP19970076030
申请日期
1997.03.27
申请人
MITSUBISHI ELECTRIC CORP
发明人
TAKI MASAKAZU;ODERA HIROKI;NISHIKAWA KAZUYASU;SHINTANI KENJI
分类号
H05H1/46;C23C16/50;C23C16/515;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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