Method and system for analyzing particles in cold plasma

摘要

The invention relates to a method of analyzing particles, in particular particles of diameter less than 1 μm, the method comprising the following steps:
firing laser shots into a cold plasma (45) at low pressure;using an optical spectrometer device (60) to acquire emission spectra of the light emitted by the plasma as a result of the laser shots, in such a manner that for each acquired spectrum, an acquisition period begins no later than 100 ns after firing the laser shot; andanalyzing the particles present in the plasma on the basis of the emission spectra.;A system for detecting and/or analyzing particles by performing the method.

主权项

1. An analysis method for analyzing particles, in particular particles of diameter less than 1 μm, the method comprising the following steps:
a) providing a cold plasma at a pressure less than 10 mbar; b) firing laser shots into the cold plasma; c) using an optical spectrometer device to acquire emission spectra of the light emitted by the plasma as a result of the laser shots, in such a manner that for each acquired spectrum, an acquisition period begins no later than 100 ns after firing the laser shot; and d) analyzing the particles present in the plasma on the basis of said emission spectra.