发明名称 X-Y Table to move loads with high precision and very high dynamic
摘要 <p>The table (A) has a base (1) on which is mounted a first plate (2) free to move along an axis (X). A second plate (3) above the first plate (2) is free to move along an orthogonal axis (Y) and is solidly attached to a carriage (4), which bears a load (CH). The carriage (4) is driven by electric linear motors (B,C) through linking plates (7) on their mobile elements (6). The motor stators (5) have alternate north and south pole permanent magnets laid transversely along their active axes and the mobile elements (6) have windings to produce a complementary magnetic system. Air or magnetic bearings are used and table displacements are automatically controlled. The length of the permanent magnets used in the motor stator exceeds the corresponding width of the mobile element windings by at least the displacement of the other motor.</p>
申请公布号 EP0871284(A2) 申请公布日期 1998.10.14
申请号 EP19980106049 申请日期 1998.04.02
申请人 WAVRE, NICOLAS 发明人 WAVRE, NICOLAS
分类号 B23Q1/62;B23Q5/28;H01L21/68;H02K5/18;H02K41/03;(IPC1-7):H02K41/02;H02K41/035 主分类号 B23Q1/62
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