Patterned ground shields for integrated circuit inductors

摘要

The performance of an integrated circuit spiral inductor is improved by fabricating a patterned ground shield [30] between the inductor [10] and the substrate [16]. The ground shield contains locally isolated conductive lines positioned substantially orthogonal to the conductive lines in the inductor, forming a grating that shields the inductor from the substrate without reducing the inductance of the inductor at high frequencies. The ground shield may also be positioned above an inductor to provide electrical shielding from other circuit elements fabricated above.