| 摘要 |
PROBLEM TO BE SOLVED: To provide a configuration measuring method whereby the measured value of duty ratio which varies little can be obtained by eliminating noises that are superimposed on a contact signal. SOLUTION: A probe 1 is vibrated by a piezoelectric element 2 in the direction of X-axis. The position of the probe 1 can be moved by a Z-axis stage 3, and an object 4 for measurement can move to aθ-axis stage 5, an X-axis stage 6 and a Y-axis stage 7. The contact signal of the probe 1 is processed by a contact signal processing part 14, and at a counter part 15 reference clocks are counted, whereby vibration cycle and conduction time are converted into digital values, so that duty ratio is calculated by a computer 13. At the contact signal processing part 14, a plurality of cycles of detection signals are measured and averaged except the cycles of detection signals that deviate from the cycle of probe driving signals by a predetermined ratio and conduction time, and from their ratio the configuration of a surface to be measured is measured.
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