| 摘要 |
A discharge tube (1) which has a pair of electrodes (8, 9) in a sealed enclosure (H), and at least either of the pair of electrodes (8, 9) contains a carbonaceous material. The enclosure (H) con tains an oxygen-containing gas which is turned into a plasma due to electric discharge between the electrodes (8, 9), and the electrodes (8, 9) are sputtered with the plasma. The discharge tube (1) may further be equipped with a to-be-sputtered member containing a carbonaceous material between the electrodes (8, 9) in the enclosure (H). |
