发明名称 Laser drawing apparatus
摘要 A laser drawing apparatus is provided that splits a laser light into a plurality of drawing beams aligned in a common plane. The aligned drawing beams are reflected and deflected through a deflecting mirror to scan a drawing surface. The beams reflected off the mirror are converged through a scanning optical system onto the drawing surface in such a manner that the height of the drawing beams on the drawing surface is in proportion to the deflection angle and a strict relationship exists between the various incident and reflecting angles as well as the focal length of the scanning optical system and pitch of the drawing beams.
申请公布号 US5892611(A) 申请公布日期 1999.04.06
申请号 US19940279748 申请日期 1994.07.22
申请人 ASAHI KOGAKU KOGYO KABUSHIKI KAISHA 发明人 IIZUKA, TAKASHI
分类号 B23K26/067;G02B26/12;G02B27/14;G03F7/20;H05K3/00;(IPC1-7):G02B26/08 主分类号 B23K26/067
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