发明名称 |
Laser drawing apparatus |
摘要 |
A laser drawing apparatus is provided that splits a laser light into a plurality of drawing beams aligned in a common plane. The aligned drawing beams are reflected and deflected through a deflecting mirror to scan a drawing surface. The beams reflected off the mirror are converged through a scanning optical system onto the drawing surface in such a manner that the height of the drawing beams on the drawing surface is in proportion to the deflection angle and a strict relationship exists between the various incident and reflecting angles as well as the focal length of the scanning optical system and pitch of the drawing beams.
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申请公布号 |
US5892611(A) |
申请公布日期 |
1999.04.06 |
申请号 |
US19940279748 |
申请日期 |
1994.07.22 |
申请人 |
ASAHI KOGAKU KOGYO KABUSHIKI KAISHA |
发明人 |
IIZUKA, TAKASHI |
分类号 |
B23K26/067;G02B26/12;G02B27/14;G03F7/20;H05K3/00;(IPC1-7):G02B26/08 |
主分类号 |
B23K26/067 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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