发明名称 Method and apparatus for producing a substrate coated with a doped fluorescent material, e.g. for radiation detectors
摘要 A doped fluorescent material in the form of a powder or a granulate in an evaporation chamber (2) under vacuum is fed onto a heated evaporation source (5). Here it is instantaneously evaporated and precipitated onto the substrate (3). The apparatus comprises a system (7) serving for delivery of the coating material onto the evaporation source.
申请公布号 DE19852326(A1) 申请公布日期 1999.11.18
申请号 DE19981052326 申请日期 1998.11.12
申请人 SIEMENS AG 发明人 FUCHS, MANFRED;HELL, ERICH;MATTERN, DETLEF
分类号 C23C14/06;C23C14/24;(IPC1-7):C23C14/24;C23C14/14 主分类号 C23C14/06
代理机构 代理人
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