发明名称 |
Method and apparatus for producing a substrate coated with a doped fluorescent material, e.g. for radiation detectors |
摘要 |
A doped fluorescent material in the form of a powder or a granulate in an evaporation chamber (2) under vacuum is fed onto a heated evaporation source (5). Here it is instantaneously evaporated and precipitated onto the substrate (3). The apparatus comprises a system (7) serving for delivery of the coating material onto the evaporation source.
|
申请公布号 |
DE19852326(A1) |
申请公布日期 |
1999.11.18 |
申请号 |
DE19981052326 |
申请日期 |
1998.11.12 |
申请人 |
SIEMENS AG |
发明人 |
FUCHS, MANFRED;HELL, ERICH;MATTERN, DETLEF |
分类号 |
C23C14/06;C23C14/24;(IPC1-7):C23C14/24;C23C14/14 |
主分类号 |
C23C14/06 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|