METHOD FOR RECORDING TEMPERATURE DATA MEASURED IN REACTION FURNACE OF SEMICONDUCTOR MANUFACTURING DEVICE,申请号JP19980162988-传众专利搜索

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发明名称	METHOD FOR RECORDING TEMPERATURE DATA MEASURED IN REACTION FURNACE OF SEMICONDUCTOR MANUFACTURING DEVICE
摘要
申请公布号	JPH11340152(A)	申请公布日期	1999.12.10
申请号	JP19980162988	申请日期	1998.05.27
申请人	KOKUSAI ELECTRIC CO LTD	发明人	MORIKAWA ATSUSHI
分类号	H01L21/22;H01L21/205;(IPC1-7):H01L21/205	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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