Substrate delivery device and strong acid or strong base etching adequate for wet process

摘要

The present invention provides a substrate delivery device and a strong acid or strong base etching adequate for a wet process. The substrate delivery device comprises: a plurality of first delivery rollers (2) parallel to one another in an etching chamber (1), a plurality of second delivery rollers (4) parallel to one another in a cleaning chamber (3) and a carrier (5) employed for carrying a substrate (100); the carrier (5) comprises two first side frames (51) located along a direction of delivering the substrate (100), two second side frames (53) connected to ends of the two first side frames (51), a plurality of first and second connection parts (55, 57) which are intercrossing and orthogonal in an area surrounded by the two first side frames (51) and the two second side frames (53) and a plurality of supports (59) at joins of the plurality of first and second connection parts (55, 57); the plurality of first and second connection parts (55, 57) are intercrossing and orthogonal with one another to form a plurality of hollow parts (52); the substrate (100) is located on the carrier (5).

主权项

1. A substrate delivery device for delivering a substrate between an etching chamber and a cleaning chamber, the substrate delivering device comprising: a plurality of first delivery rollers parallel to one another in an etching chamber, a plurality of second delivery rollers parallel to one another in a cleaning chamber and a carrier employed for carrying a substrate; the carrier comprises two first side frames located along a direction of delivering the substrate, two second side frames connected to ends of the two first side frames, a plurality of first connection parts and a plurality of second connection parts which are intercrossing and orthogonal in an area surrounded by the two first side frames and the two second side frames and a plurality of supports at joins of the plurality of first connection parts and the plurality of second connection parts; the plurality of first connection parts and the plurality of second connection parts are intercrossing and orthogonal with one another to form a plurality of hollow parts; the substrate is located on the carrier;
wherein, the substrate delivery device further comprising a support frame, and the support frame comprises a plurality of first support plates parallel with the first side frames and a plurality of second support plates perpendicularly connected to the plurality of first support plates, and the second support plates are located below the plurality of supports; the support frame is located on the plurality of first delivery rollers and the plurality of second delivery rollers, and the carrier is located on the support frame; and wherein, a first distance formed between two of the plurality of first support plates is greater than a second distance formed between the two first side frames, and only the plurality of first support plates of the support frame are located on the plurality of first delivery rollers and the plurality of second delivery rollers; the support frame is made of polyfluortetraethylene (PTFE).