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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH11354451(A)
申请公布日期
1999.12.24
申请号
JP19980157129
申请日期
1998.06.05
申请人
HITACHI LTD
发明人
OKA TORU;KUDO MAKOTO
分类号
H01L29/73;H01L21/203;H01L21/205;H01L21/331;H01L29/205;H01L29/737;H01S5/00;(IPC1-7):H01L21/203;H01S3/18
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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