| 摘要 |
PROBLEM TO BE SOLVED: To reduce the size of equipment as a whole as small as possible even in the case of a reactor having a large diameter to allow installation in a small space. SOLUTION: An antenna 11 for introducing a microwave into a reactor 1 is provided in a periphery of a hole opened in a cover member 10. The antenna 11 is provided with an annular waveguide antenna 12 comprising a member U-shaped in the cross-sectional view and formed into an annular shape, and plural slits 15, 15,... are opened in a portion of the cover member 10 facing to the annular waveguide antenna 12. A ring-like insulating member 24 is internally fitted into the hole of the cover member 10, and a disk-like electrode member 25 is engaged inside the insulating member 24. The electrode member 25 is connected to a second high-frequency electric power source 27 by a coaxial cable, and 13.56 MHz of high-frequency wave is impressed to the electrode member 25 from the second high-frequency electric power source 27.
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