| 摘要 |
PROBLEM TO BE SOLVED: To provide multiple discharge, and to allow structure of a three- dimensional plasma region to be varied, by arranging three-dimensionally three- phase-twelve-phase alternating current conversion power sources having six single-phase alternating current transformers as the basic constitution, and twelve discharge electrodes introduced by the power sources. SOLUTION: A star-star connection and a delta-star connection are used for a three-phase-six-phase conversion system, and a three-phase-twelve-phase alternating current conversion power source for phase-converting a three-phase alternating current into twelve-phase alternating current directly only using a transformer to be output is constituted utilizing 30 degree of phase displacement between the two connections. Outputs of plural three-phase-twelve-phase alternating current conversion power sources are connected to discharge electrodes respectively, they are arranged horizontally on a circumference with equal spaces to be grouped for discharge, groups therein are multiplied to generate plasma three-dimensionally, structure of a plasma region having a discharge space of high density in its central part is provided thereby, and the structure of the three-dimensional plasma region is varied by controlling current flowing in the electrodes.
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