| 摘要 |
PROBLEM TO BE SOLVED: To observe the direction of variation (increase and decrease) in conformity with the size of variation of a magnetic field by installing a mechanism for detecting deflection generating when an electron beam probe is passed through an observation region and a mechanism for detecting deflection difference between two electron beam probes in deflection. SOLUTION: An electron beam 2 is divided into two probe beams 4 with a biprism 3, and passed through an observation region 6. The probe beams 4 are inputted in a slit 10 through a deflection detection aperture 11 within a projection electron optical system 9, and intensity of the probe beams 4 passing through an opening of the slit 10 is detected with a detector 12, and a scanning image using a signal I1 as a brightness signal is formed with an image forming device 14 through a scanning control device 13 and a scanning deflector 8, and a contour image of the variation of the magnetic flux amount passing through between the probe beams 4 is obtained. In the image forming device 14, a scanning image using a signal I2 obtained by calculation of signals I0 and I1 as a brightness signal in addition to the signal I1 is formed, based on computation of a signal arithmetic unit 15, and an image of the direction in addition to an image of the variation of the magnetic field can be obtained.
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