| 摘要 |
PROBLEM TO BE SOLVED: To provide a device generating a plasma having an in-plane uniform density by propagating microwaves with the circular TM01 mode in a circular waveguide, and arranging a circular dielectric plate on the circular waveguide side of a microwave introducing window plate. SOLUTION: A circular waveguide 5 propagates microwaves with the circular TM01 mode. A window plate 6B is inserted into a microwave introducing window 6A, and a circular dielectric plate 8 with fixed thickness is installed directly above the window plate 6B. Magnetic field is formed by an exciting coil 11 in a plasma generation chamber 6, microwaves are introduced into the plasma generation chamber 6 through the window plate 6B, and plasma is generated via electron cyclotron resonance excitation. When the circular dielectric plate 8 is installed between the circular waveguide 5 and the microwave introducing window 6A of the plasma generation chamber 6, microwaves with uniform field intensity are introduced into the plasma generation chamber 6, and uniform plasma is generated.
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