| 摘要 |
An angling device (3) is provided with a plurality of holding units (10A-10E) for holding a plurality of substrates (100) respectively to align the substrates (100) in the up/down direction while being placed horizontally, first ascending bodies (21A-21E) including a plurality of first support portions (11A-11E), and second ascending bodies (22A-22E) including a plurality of second support portions (12A-12E). A series of angling operations including angling one selected substrate (100) by integrally rotating the plurality of holding portions (10A-10E), and raising the first support portions (11A-11E) corresponding to the angled substrate (100) such that the substrate (100) is lifted by the first support portions (11A-11E), are performed repeatedly while consecutively selecting substrates. The plurality of second support portions (12A-12E) are raised simultaneously and a plurality of angled substrates (100Z) supported by the respective plurality of first support portions (11A-11E) are respectively lifted by the plurality of second support portions (12A-12E). |
