发明名称 VERSATILE FLOW RATE CONTROLLER
摘要 <p>A versatile flow rate controller comprises an orifice (8) exchangeable depending on the required opening for a different fluid and a different flow rate range, a control valve (2) on the upstream side, a pressure detector (6) between the control valve (2) and the orifice (8), an arithmetic circuit (14) for calculating a flow rate as Qc=KP1 (K is a constant) from an upstream pressure P1 detected by the detector (6); an output circuit (16) for providing a flow-setting signal Qe, a converter circuit (18) for producing a flow rate signal Qf (Qf=kQc) by multiplying the calculated flow rate signal Qc by a factor k to change the full-scale flow rate, and a control circuit (20) for supplying a driver section (4) of the control valve (2) with a control signal Qy corresponding to the difference between the Qf and Qe.</p>
申请公布号 WO0011532(A1) 申请公布日期 2000.03.02
申请号 WO1999JP04311 申请日期 1999.08.09
申请人 FUJIKIN INCORPORATED;TOKYO ELECTRON LTD.;OHMI, TADAHIRO;KAGATSUME, SATOSHI;HIROSE, JUN;NISHINO, KOUJI 发明人 OHMI, TADAHIRO;KAGATSUME, SATOSHI;HIROSE, JUN;NISHINO, KOUJI
分类号 F16K7/14;C01B5/00;F15D1/04;F16K31/06;G05B11/36;G05D7/06;(IPC1-7):G05D7/06 主分类号 F16K7/14
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