发明名称 |
VERSATILE FLOW RATE CONTROLLER |
摘要 |
<p>A versatile flow rate controller comprises an orifice (8) exchangeable depending on the required opening for a different fluid and a different flow rate range, a control valve (2) on the upstream side, a pressure detector (6) between the control valve (2) and the orifice (8), an arithmetic circuit (14) for calculating a flow rate as Qc=KP1 (K is a constant) from an upstream pressure P1 detected by the detector (6); an output circuit (16) for providing a flow-setting signal Qe, a converter circuit (18) for producing a flow rate signal Qf (Qf=kQc) by multiplying the calculated flow rate signal Qc by a factor k to change the full-scale flow rate, and a control circuit (20) for supplying a driver section (4) of the control valve (2) with a control signal Qy corresponding to the difference between the Qf and Qe.</p> |
申请公布号 |
WO0011532(A1) |
申请公布日期 |
2000.03.02 |
申请号 |
WO1999JP04311 |
申请日期 |
1999.08.09 |
申请人 |
FUJIKIN INCORPORATED;TOKYO ELECTRON LTD.;OHMI, TADAHIRO;KAGATSUME, SATOSHI;HIROSE, JUN;NISHINO, KOUJI |
发明人 |
OHMI, TADAHIRO;KAGATSUME, SATOSHI;HIROSE, JUN;NISHINO, KOUJI |
分类号 |
F16K7/14;C01B5/00;F15D1/04;F16K31/06;G05B11/36;G05D7/06;(IPC1-7):G05D7/06 |
主分类号 |
F16K7/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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