| 摘要 |
PURPOSE: A method and apparatus for detecting an inconsistent of a surface pattern is provided, which is efficiently used in the manufacture of a liquid display panel and a polysilicon TFT substrate. CONSTITUTION: An apparatus for detecting an inconsistent of a surface pattern comprises: an optical source (20) to be arranged on an upper side of a substrate for emitting a light on a horizontal surface of the substrate at a first certain angle; a first sensor camera unit (10) to be arranged on an other upper side of the substrate for and surveying a light to be incident to a sensor at a second certain angle and testing a pattern inconsistent; and a second sensor camera unit (10A) for testing a fault of a pattern of the substrate surface. Thereby, the apparatus is used in an emission inconsistent of a laser efficiently. |
