| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum film forming device capable of previously estimating the state of a thin film formed on the body to be film-formed by detecting the atmosphere in a vacuum chamber. SOLUTION: A plasma beam 22 is generated toward the inside of a vacuum chamber 12 by a plasma gun 11 in a vacuum film forming device 10. A short tube part 12A is projected toward the outlet port part of the plasma gun 11, and a convergent coil 18 is provided so as to surround the short tube part 12A. A film forming material 20 in a crucible 19 is evaporated by a plasma beam 22, and, from the evaporated film forming material 20, a thin film is formed on a substrate 13. The atmosphere in the vacuum chamber 12 is detected by a mass spectrometer 55, and, based on the signal from the mass spectrometer 55, a regulating valve 57 in an oxygen feed tube 43 is controlled by a control part 58.
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