发明名称 |
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR |
摘要 |
PURPOSE: A semiconductor device and a method for manufacturing the same are provided to improve reliability of the device by securing a sufficient channel length in a limited area. CONSTITUTION: A semiconductor devide includes an oxide film(22) on a semiconductor substrate(21) of a concave-convex shape. The first polysilicon layer(23) as a planarization layer is formed on the oxide film(22). A field oxide film(24) is formed in a field region of the first polysilicon layer(23). A gate oxide film(25) and a gate electrode(26a) are formed in the active region. A source/drain impurity diffusion region(28) is formed within the surface of the first polysilicon layer(23) at both sides of the gate electrode(26a).
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申请公布号 |
KR100252849(B1) |
申请公布日期 |
2000.04.15 |
申请号 |
KR19970049213 |
申请日期 |
1997.09.26 |
申请人 |
HYUNDAI MICRO ELECTRONICS CO.,LTD. |
发明人 |
JONG, SHIN YONG |
分类号 |
H01L21/31;(IPC1-7):H01L21/31 |
主分类号 |
H01L21/31 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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