| 发明名称 |
VALVE, FLUID CONTROL STRUCTURE, FLUID DEVICE AND METHOD OF MANUFACTURING VALVE |
| 摘要 |
A valve disposed at a flow path includes: a substrate having a first surface in which a hole having an opening section is formed; and a diaphragm member fixed to at least part of a wall surface of the hole and in which at least a central portion has a thin film shape, wherein a flow of a fluid in the flow path is controlled by deforming the diaphragm member. |
| 申请公布号 |
US2016319944(A1) |
申请公布日期 |
2016.11.03 |
| 申请号 |
US201615172453 |
申请日期 |
2016.06.03 |
| 申请人 |
The University of Tokyo ;Nikon Corporation |
发明人 |
ICHIKI Takanori;KOBAYASHI Masashi;TERANE Shotaro;SUZUKI Kuno |
| 分类号 |
F16K7/12;B23P15/00;F04B43/02 |
主分类号 |
F16K7/12 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A valve disposed at a flow path, the valve comprising:
a substrate having a first surface in which a hole having an opening section is formed; and a diaphragm member fixed to at least part of a wall surface of the hole and in which at least a central portion has a thin film shape, wherein a flow of a fluid in the flow path is controlled by deforming the diaphragm member. |
| 地址 |
Tokyo JP |
