GAS INLET VALVE WITH INCOMPATIBLE MATERIALS ISOLATION

摘要

A gas inlet valve with incompatible materials isolation is provided. The valve may include a piston that seals against a surface when in a closed position and that permits gas to flow through the valve and out the outlet port when in an open position. A bellows may protect the actuation mechanism of the piston from gas that may be present in the valve when the valve is in the open or closed position, and the piston may include a second seal interface that seals the bellows off from the gas flow area when the valve is in the open or closed position.

主权项

1. A valve configured to regulate gas flow to a semiconductor manufacturing apparatus, the valve comprising:
a body, the body including:
a cavity at least partially bounded by an interior surface of the body, andat least one inlet port, wherein the at least one inlet port is fluidically connected with the cavity; a bellows sealed to a first portion of the interior surface of the body; and a piston assembly at least partially located within the body and movable between an open configuration and a closed configuration, wherein:
when the piston assembly is in at least the open configuration, a portion of the piston assembly seals a portion of the cavity containing the bellows off from another portion of the cavity in fluidic communication with the at least one inlet port.