| 摘要 |
PROBLEM TO BE SOLVED: To reduce the loss of a separation agent in an overflow and in exhaust air of a coating device and to swiftly made a driving preparation completed state by forming a nozzle body of a closed hollow body and connecting an evaporation vessel to the nozzle body so as to be capable of cutoff. SOLUTION: This vapor deposition device has an evaporation vessel 1 connected to a nozzle body 3 via a conduit 2. This conduit 2 is connected with a cutoff device 4 to prevent the inflow of vapor from the evaporation vessel 1 to the nozzle body 3. The evaporation vessel 1 has an electric heater 5 and also has a temp. sensor 6 for controlling the temp. and, in its turn, for controlling the ratio of a separation agent. The upper face of the nozzle body 3 is provided with plural outflow openings 7 with a cross-sectional square shape in a line, and the vapor of the separation agent flows toward a sheet 8 via the outflow openings 7 and condensed on the sheet 8 to form plural strips elongating in the longitudinal direction of the sheet 8. As to these strips, in the succeding stage, the separation agent is evaporated in the process of the coating satge, and they are not coated by metal.
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