| 摘要 |
PROBLEM TO BE SOLVED: To provide an LSI tester with a light source for improved measurement performance and reduced size by shielding an irradiation light from a light source, with a simple configuration from the outside light. SOLUTION: A light source part 43 for irradiating a measurement device, a test head 41, and a performance board 4, are provided. Here, a through-hole 42 provided at the central part of the test head 41, the light source part 43 provided in the through-hole 42, a light-shielding cylinder which shields the light projected to the measurement device from the light source part 43 of the test head 41 provided at the performance board 4 from an external light, are provided.
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