| 摘要 |
PROBLEM TO BE SOLVED: To make avoidable or reducible the bend of a mount surface due to the weight of an object by constituting so that the projected surface of the second member arranged below the first member having nearly a plane mount surface touches the first member. SOLUTION: A mount glass 1 whereon an object 3 is put is supported and engaged in the nearly center of a mount stage upper plate 2 by way of pressure sensors in the peripheral part. Under the mount glass 1, an auxiliary glass member 6 having an upward convex shape with a uniform curvature is arranged, which touches the mount glass 1 in nearly the center. The auxiliary glass member 6 is supported by a mount stage upper plate 2 by way of a piezoelectric element 8. The piezoelectric element 8 expands and shrinks according to the input signal and pushes the auxiliary glass member 6 upward. The mount glass 1 is freely movable in crossing X and T directions together with the object by the guiding mechanism below the mount stage upper plate 2. The object 3 is illuminated from below by a transmission illumination optical system 5 and observed with an observation optical system 4.
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