| 摘要 |
PROBLEM TO BE SOLVED: To shorten the deposition working time as much as possible, and to improve the durability of a crucible by keeping a raw material for deposition in a molten condition even after the deposition of one batch is completed. SOLUTION: After the deposition of one batch is completed, heating of an aluminum metal which is a raw material for deposition by the electron beam from an electron beam heating device 6 is stopped, and a heating and heat- insulating device 9 is operated as soon as the evacuation is started. Then, the raw material for deposition in a crucible 5 is heated and heat-insulated by the irradiation of the infrared ray from an infrared ray lamp 10, and the molten condition of the raw material for deposition is kept. Even if the heating by the electron beam is stopped after the deposition is completed, the molten condition of the raw material for deposition can be maintained, and the raw material for deposition is not solidified and the solidified raw material for deposition needs not be heated or melted from the beginning in the next deposition. The deposition time required for one batch is shortened, the crucible 5 is not cooled after the deposition of one batch is completed, expansion and contraction of a ceramic itself are suppressed, the crucible 5 is free from fatigue, and the service life of the crucible 5 is increased.
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