| 摘要 |
PROBLEM TO BE SOLVED: To enhance a manufacturing yield in a semiconductor manufacture by a method wherein process parameters are measured by a sensor and are stored in a storage device, and also the process parameters are traced by a timing device as a temporal function. SOLUTION: A semiconductor wafer 10 is fitted on a chamber in order to inspect a manufacture process, and various process parameters are measured by a sensor 14 provided in a region such as an end part 16 of the wafer 10, a center part of the wafer 10, or the like with respect to uniformity of the entire wafer 10 during the process, and the measured process parameters are stored in a storage device. Furthermore, data of the process parameters are read out via a data interface 32, and the process parameters are traced by a plurality of timing devices having a power source as a temporal function. Thereby, it is possible to enhance a manufacturing yield in a semiconductor manufacture.
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