| 摘要 |
PROBLEM TO BE SOLVED: To provide an appearance inspection device and method by which the productivity of appearance inspections can be improved by shorting the processing time of the inspections as a whole, and sufficient defect analysis can be performed even in a short time. SOLUTION: This appearance inspection device is provided with a picture acquiring means 16, a defect information generating means 50 which generates defect information by performing defect detection by comparing picture data with each other, and an automatic defect classifying means 31 which automatically classify detects from the picture of defective sections. The classifying means 50 is provided with a buffer memory 22 for comparison which temporarily stores picture data, a picture comparing means 51 which detect defects by comparing the picture data of two dies with each other, a buffer memory 52 for analysis which temporarily stores picture data, and a sampling processing and controlling means 53 which selects a section to be analyzed based on the defect information and transfers necessary picture data to the classifying means 31. Since the sampling processing and controlling means 53 immediately makes the selection and transfer of a defect to be analyzed when the defect information is generated, the defect detection and part of classification are carried out in parallel.
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